Flow sensor for gas (CKD)

A small flow sensor for gas with 2-screen 2-color display.
It offers two types: integrated and separated display.

Compact even with large flow rate
Flow rate range: 0.5 to 1,000 ℓ/min
With the 500 and 1000 ℓ/min types, the body size has been reduced by 30% compared to conventional models, attaining high downsizing.

Straight piping section not required
As a rectifier mechanism is built in, straight piping sections are not required at either the upstream or downstream sides, allowing it to be installed anywhere.

Bi-directional measurement
The flow direction can be randomly set for measurement with the display integrated bi-directional type.

High-speed response
The platinum sensor chip manufactured with silicon micromachining realizes the response time of 50 m/sec.

Clean-room specifications
P70 (anti-dust generation) and P80 (oil-prohibited specifications) are available as standard.
Perfect for semiconductor and liquid crystal manufacturing applications.