MMD Series (CKD)

This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations.

  • The spring seal provides stable sealing (MMD**2, GMMD**2, TMD series)
  • Assorted fitting variations
  • The easy-to-read indicator enables open/close status to be checked visually
  • No harmful polyvinyl chlorides

No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series).

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  • CKD series MMD process valves